Despite the challenges in 2020 with no real face-to-face sales meetings, no conference or tradeshow participation since early March, we are were pleased to be able to present a peak in sales orders worth more than 4 MEUR during the past few months.
Orders include the delivery of two Flextura 200 Cluster tools with our new Flextura M700 LS sputtering modules. The M700 LS sputtering modules have shown superior performance of especially some metal oxide and nitride films – partly developed in close collaboration with our customer.
Looking for a flexible partner for your next thin film process? We experience a continued growing interest in our Flextura PVD platform from both industry and institutes in Europe – borne by the willingness to pursue the joint success.
Last years collaborations have resulted in some unique process modules for the Flextura 200 Cluster platform:
- M600 GLAD Module – Glancing angle deposition by ebeam evaporation in a fully automated CMOS compatible tool for processing of up to 200mm wafers from cassette
- M500 EPI Module – Epitaxial growth sputtering module
- Proven low stress & highly c-axis oriented AlN process
- A large parameter room for new materials with substrate temperatures up to 1000°C
- M700 LS Module – Superior sheet resistance uniformities for metal oxides & nitrides
Flextura 200 Cluster tool – Ready for AlN developments at Aalborg University