FLEXTURA 200 CLUSTER

The most modular 200 mm PVD platform

FLEXTURA 200 CLUSTER

The Flextura 200 Cluster platform is probably the most flexible 200 mm PVD cluster tool available. It is truly almost Plug&Play and you may add process modules as your need for capacity or new processes increase.

Proven reliable wafer handling by Brooks MAG LEAP robot, cassette-to-cassette processing – SEMI standard cassette or custom cassette for even more flexibility.

The Flextura way of thinking is giving you the possibility to let the capital investment follow the increasing demands of your facility.

Get in touch with our experts

P: +45 9689 2800

Cluster platform highlights

Process frame for epitaxial growth of thin films at elevated temperatures up to 1000°C
Evaporation module for deposition on multiple wafers with planetary rotation
Glancing angle deposition on wafers in volume production
Dynamic in-situ feedback control by PEM or RGA in reactive sputtering
Electrostatic chuck (ESC) with backside gas for substrate cooling or heating, RF/DC bias option
P-chuck – pneumatic chuck with edge clamp
Remote Plasma Sputtering technology
SECS/GEM, Direct SQL server logging
Market leading process software technology for accurate real time control of deposition
Bridge tool – from R&D to 200mm wafers – standard SEMI or custom cassette

Standard process modules for Flextura 200 PVD platform

Flextura sputtering modules

The Magnetron Sputtering modules of the Flextura PVD platform handles sputtering processes from well-known standard metallisation or electrode layers to reactive sputtering of highly c-axis oriented and low stress AlN, TCO’s or even ternary alloys.

Circular scanning magnetron (CSM) sputter module
Confocal sputtering
- Multiple magnetrons
- Multilayers in one module
- Co-sputtering
Linear sputtering
- Single or dual magnetrons
- Planar or rotatable setup
HiPIMS sputtering module
- High aspect ratio metallisation
- Layer property tuning
DC, pDC, and RF, Bipolar magnetron sputtering
Reactive and nonreactive sputtering

Flextura evaporation modules

The Evaporation modules covers a range of evaporation processes and combinations of these including e-beam, thermal evaporation, resistive evaporation, as well as ion beam assisted deposition (IBAD).

Though not well known as a process in connection with a cluster tool, the Flextura evaporation modules can be connected to the Flextura Cluster platform for single substrate processing of advanced processes like high temperature epitaxial growth (still mainly R&D), or volume production of GLAD films – directly from cassette.

Compatible with top-down as well as bottom-up processing
CMOS compatible
Combination of E-beam and thermal evaporation
Multi wafer stage with planetary rotation combined with automatic loading

GLAD Module

The Flextura GLAD module is a production proven glancing angle evaporation module for industry scale volumes with fully automated substrate handling from cassette. Fully compatible with standard top-down processing ensuring fast and direct integration with complementary processes like degas, etch or sputtering.

Proven up to 200 mm diameter substrates
Rotation: 0-40 rpm, tilt: 0-180°, resolution 0.1°
GLAD stage with water cooling, ESC, or pneumatic chuck
Special ebeam crucible with 12x60cc pockets
Automatic pellet feeder option
Low base pressure <5E-8 mbar
SECS/GEM, MES direct SQL server logging

Proof of concept or contract R&D available for 100 mm!

Substrate Degas, Pre-clean & Etch Modules

Substrate degas or pre-clean can be essential for both your process quality and your throughput. The Flextura platform offers dedicated modules to address both.

Hot chuck degas module
Quartz lamp degas module
RF Etch Module
ICP soft etch module

Substrate loading

The modularity of the Flextura platform provides the possibility to choose substrate loading, and to add modules according to need.

Batch system

Start from a highly flexible standalone system

Single substrate load lock

Add additional processes and analytics

Cassette load lock

Fully automate your deposition process with cassette handling

Fully automated cluster system

Save valuable clean room space

Add process modules

Increase capacity with more modules without compromising flexibility

Is the Flextura Cluster the correct PVD system for you?

Contact us for a technical and dedicated discussion regarding your needs, or download our brochure on the Flextura Cluster to read more!

+45 9689 2800