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Flextura 300 cluster PVD platform

The most flexible 300 mm platform

Flextura 300 mm cluster

The Flextura 300 Cluster tool – a highly reliable PVD platform – is an excellent choice for the deposition of metals, oxides, and nitrides to produce high-quality thin films.

Including degas, pre-clean, and PVD modules, and utilising the flexibility of the Flextura platform, the Flextura 300 Cluster allows the configuration to be optimised to best fit the application.

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P: +45 9689 2800

Platform highlights

  • Atmospheric front-end with Brooks JCP EFEM and up to 4 FOUP load ports
  • Wafer mapping, wafer aligner, and cross-slot detection
  • Vision™ Leap industry standard load ports supporting up to 300mm FOUPs
  • Proven reliable wafer handling by Brooks Magnatron LEAP dual arm robot for maximum throughput and wafer placement repeatability
  • SECS/GEM compliant communication
  • GEM300 interface integration, Direct SQL server logging
  • Optional EDA/Interface A 
  • Substrate heating up to 950° C during deposition 
  • Room for up to six process modules 
Flextura 300 PVD system

Standard process modules for Flextura 300 PVD platform

Sputtering modules

  • Circular scanning magnetron (CSM) sputter module
  • Confocal sputtering
    • Multiple magnetrons
    • Multilayers in one module
    • Co-sputtering
  • Linear sputtering
    • Single or dual magnetrons
    • Planar or rotatable setup
  • DC, pDC, and RF magnetron sputtering
  • Reactive and nonreactive sputtering

Evaporation modules

  • E-beam evaporation module
  • Resistive evaporation module
  • Compatible with top-down as well as bottom-up processing

Degas, Pre-clean & Etch Modules

Substrate degas or pre-clean can be essential for both your process quality and your throughput. The Flextura platform offers dedicated modules to address both.

  • Hot chuck degas module
  • Quartz lamp degas module
  • RF Etch Module
  • ICP soft etch module

Start a conversation

Whether you are specifying a new system, scaling an existing process, or evaluating PVD for a new application — contact the Polyteknik team for a technical discussion tailored to your requirements.
Contact us
+45 9689 2800
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