Flextura Evaporator

High-uniformity e-beam, thermal & ibad deposition

Flextura Evaporator

The Flextura Evaporator is a high-uniformity evaporation system covering electron beam (e-beam) evaporation, thermal (resistive) evaporation, ion beam assisted deposition (IBAD), and combinations of these processes within a single platform.

Flextura evaporation modules can be connected directly to the Flextura Cluster platform for single-substrate processing of advanced applications such as high-temperature epitaxial growth (currently primarily R&D), or for cassette-to-cassette production of GLAD films.

The Evaporator modules are well suited to very high uniformity depositions for SAW/BAW devices, metallisation in semiconductor, LED and MEMS production, and deposition of metals and dielectrics for optoelectronics. An extended throw option supports high-volume lift-off processes.

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P: +45 9689 2800

Evaporation processes

Polyteknik has delivered variously sized evaporation systems for both high-end industry and university R&D. A combination of highly skilled process, software and mechanical engineers secures the most optimum evaporation solution, including:

E-beam evaporation
Thermal evaporation
Glancing angle deposition (GLAD)
Ion beam assisted deposition (IBAD)

Choose Substrate Loading

You can run the Flextura Evaporator as a batch system, with a single-substrate load lock, a cassette load lock, or integrated into the Flextura Cluster platform.

Start with a flexible standalone system and add processes and analytics later as your thin-film research or business grows – without compromising on flexibility or clean room space.

For independent deposition systems, the Flextura Evaporator combined with a single-substrate load lock is a versatile, high-quality tool.

Batch system
Single substrate loading
Cassette loading
Cluster system

Can the Flextura Evaporator be integrated into a cluster system?

Yes.

Flextura Evaporator modules can be connected to the Flextura Cluster platform for fully automated, single-substrate or cassette-to-cassette processing, allowing additional process modules and analytics to be added as production needs grow.

What substrate loading configurations are available?

The Flextura Evaporator can be configured as a batch system, with a single-substrate load lock, with a cassette load lock, or as part of a fully automated Flextura Cluster system — covering everything from R&D to high-volume production.

What applications is the Flextura Evaporator used for?

Typical applications include high-uniformity layers for SAW/BAW devices, metallisation for semiconductor, LED and MEMS production, metal and dielectric layers for optoelectronics, and GLAD nanostructured films — supported by an extended throw option for high-volume lift-off processes.

Interested in a Flextura Evaporator module?

Contact us for a technical and dedicated discussion regarding your needs, or download our brochure on the Flextura PVD Platform to read more!

+45 9689 2800