Infinity VB

In-line vertical sputtering platform designed for highvolume coating on large substrates

Infinity VB PVD system

The Infinity VB is a vertical sputtering platform designed for large-area deposition on substrates or multi-substrate fixtures up to 650 × 650 mm.

The vertical configuration enables single- or dual-side deposition using linear magnetrons, providing efficient coating of larger surfaces and high-throughput needs. The system can be adapted to different substrate shapes, sizes, and process requirements, making it suitable for demanding large-area coating applications.

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Main features of the Infinity VB sputtering platform

Designed for substrates up to 650 × 650 mm, the system combines flexible substrate handling with high-performance sputtering capabilities for demanding manufacturing applications. Options include active substrate cooling, HiPIMS combined with substrate biasing for high-aspect-ratio through-hole metallisation, and an automatic multi-substrate loading magazine for increased throughput.

The modular system consists of at least one process chamber and one load lock. Substrates are mounted in a moving vertical fixture and can optionally be sputtered from both sides using linear magnetrons.

The configuration is designed for high-volume manufacturing, offering short pump-down times, high coating uniformity and low levels of pinhole defects.

As production requirements grow, the system can be expanded into a fully automated inline system with multiple process modules, providing a scalable path to increased capacity and process capability.

Sputtering process

High throughput
Modular design
Reactive sputtering
DC/RF/Bipolar/HiPIMS/MF
Up to 6 linear magnetrons
Dual side sputtering

Typical application areas

Sheet coating (standard up to 650 x 650mm)
Sheet coating (extended up to 650 x 3000mm)
Sheet coating (custom size)
Metalisation in mechatronics
MEMS and Piezo sensor fabrication
AR and high reflective mirror coatings
Battery, Fuel cell, Hydrogen and TEG production
Solar absorbers

Interested in the Infinity VB?

Contact us for a technical and dedicated discussion regarding your needs, or download our brochure on the Infinity VB Platform to read more!!

+45 9689 2800