Visit Polyteknik at MEMS 2026 in Salzburg
13. January 2026
Visit us at MEMS 2026, Booth 5 for a talk about our innovative solutions in thin film deposition:
- High-quality c-axis oriented #AlN sputtering (Rc FWHM <1.0°)
- Glancing angle deposition by #Ebeam evaporation in a fully automated, CMOS-compatible tool (up to 200 mm wafers)
- Magnetron sputtering epitaxy module with substrate temperatures up to 1000 °C
- Proven metal oxide & nitride sputtering module with superior sheet resistance uniformity – enabling #quantum & #neuromorphic computing
- Advanced magnetic materials sputtering – no target thickness limits, from ultra-thin to bulk layers
- Low stress / damage sputtering – adjustable layer tension, good conformal coatings
📍 Booth 5
📅 January 25-29
📌 Salzburg, Austria
You are always welcome to contact us at sales@polyteknik.dk, or one of our first points of contact, if you want to book a meeting or you have other inquiries.
We are looking forward to seeing you in 2026!

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