FLEXTURA R&D

Advanced thin film production

FLEXTURA R&D

Research and development sputtering and evaporation cluster system Polyteknik AS PVD system cluster thin film

FLEXTURA R&D

The Flextura R&D Cluster is a truly unique research and development platform with a base of the best and most reliable industrial components topped with options for the latest deposition processes in combination with advanced analysis of thin film. It is unveiling a new way of modular thinking for PVD systems. From a single chamber with evaporation or sputtering processes as a standalone system to an efficient research and development cluster tool with multiple advanced processes.

Bottom line – The Flextura R&D Cluster platform delivers advanced thin film research results faster by automated deposition and to some extent automated analysis results for the researcher who will have more time to interpret results, write articles and optimise or find our next wonder material!

MAIN FEATURES

Process Modules

High temperature deposition chamber up to 1000 deg C
- Increased layer quality
- Epitaxial growth
HiPIMS sputtering (highly ionised) chamber
- High aspect ratio metallisation
- Layer property tuning
Direct magnetron sputtering (DC, RF and pDC)
Multi-magnetron chamber (Co-sputtering)
Ebeam evaporation
RF/ICP etch, degass, cooling, alignment station
Single wafer or batch processing directly cassette-to-cassette

Special Applications

Process frame for epitaxial growth of thin films at elevated temperatures up to 1000C
Glancing Angle deposition by evaporation or sputtering
Dynamic in-situ feedback control by PEM or RGA in reactive sputtering
HiPIMS sputtering for highly ionised deposition
Remote Plasma Sputtering
RF/DC bias option
Market leading process software technology for accurate real time control of deposition

System highlights

Cassette-to-cassette (typical 10 pcs substrates, carriers or masks)
Individual recipe for each substrate or a batch recipe
Advanced high temperature PVD processing of non-standard semicon solutions
Multi magnetron chambers for true co-deposition
Automatic loading to single batch fixture
Bottom-up or top-down processing

Integrated Analytical Modules

In-situ during deposition or etch process
- RHEED (Reflective High Energy Electron Diffraction ) for monitoring of epitaxial growth
- PEM (Plasma Emission Monitoring) for dynamic regulation and control of stoichiometry in reactive sputtering processes
UHV analytical chamber connected to the cluster (analysis without breaking vacuum)
- LEED (Low Energy Electron Diffration)
- UPS (Ultraviolet Photoemission Spectroscopy)
- XPS (X-ray Photoemission Spectroscopy)
- Other on request

Is the Flextura platform the correct PVD system for your research and development needs?
Contact us for a technical and dedicated discussion regarding your needs,
or download our brochure on the Flextura PVD Platform to read more!

Brochure

Webbureau ITTP

Cookie Policy

What is a cookie?

A cookie is a small datafile that is saved on your computer, tablet or mobile phone. A cookie is not a program that can contain harmful programs or viruses.

How/why the homepage uses cookies

Cookies are necessary for the homepage to function. Cookies help us get an overview of your visit to the homepage so that we can continually optimise and adjust the homepage to your requirements and interests. For example, cookies remember what you might have added to a shopping cart, if you have previously visited the page, if you are logged in and what languages and currency you want displayed on the homepage. We also use cookies to target our ads to you on other homepages. On a very general level, cookies are used as part of our services in order to show content that is as relevant as possible to you.

How long are cookies saved?

How long cookies are saved on your device can vary. The time when they are scheduled to expire is calculated from the last date you visited the homepage. When cookies expire, they are automatically deleted. You can view a complete list of cookies below.

This is how you can reject or delete your cookies

You can always reject cookies on your computer, tablet or phone by changing your browser settings. Where these settings can be found depends on the type of browser you are using. If you do change the settings, please be aware that there will be some functions and services that you cannot use because they rely on the homepage being able to remember the choices you have made.

You can choose to not receive cookies from Google Analytics here.

Deleting cookies

You can delete cookies that you have previously accepted. If you are using a PC with a recent version of a browser, you can delete your cookies by using these shortcut keys: CTRL + SHIFT + Delete.

If the shortcut keys do not work and/or you are using an Apple computer, you must find out what browser you are using and then click on the relevant link:

Remember: If you are using several different browsers, you must delete the cookies in all of them.

FLEXTURA R&D

FLEXTURA R&D

MAIN FEATURES

Process Modules

Special Applications

System highlights

Integrated Analytical Modules

PVD Systems

Coating Service

Information